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Item 1 of 1
Item 1 of 1
Springer
Modelling of Microfabrication Systems
SR 691
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SR41Per Month/24 months
This book is printed on demand and is non-refundable after purchase
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About this Product
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
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