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  1. Shape and Functional Elements of the Bulk Silicon Microtechnique : A Manual of Wet-Etched Silicon Structures
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Shape and Functional Elements of the Bulk Silicon Microtechnique : A Manual of Wet-Etched Silicon Structures

Printed Book
SR 647
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Sold as: EACH
SR39Per Month/24 months
Author:Frühauf, Joachim
Date of Publication: 2010
Book classification:Engineering,English Books
No. of pages:236 Pages
Format:Paperback

This book is printed on demand and is non-refundable after purchase

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About this Product

Technological Basis of Bulk-Silicon-Microtechnique.- Orientation Dependent Etching of Silicon.- General Overview of the Shape- and Functional Elements and the Procedure of their Design.- Simple Shape Elements.- Elements for Mechanical Applications.- Elements for Fluidic Applications.- Elements for Optical Applications.
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Specifications

SKU9783642060489
Manufacturer Number9783642060489
year published2010
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