EngineeringLPCVD Silicon Nitride and Oxynitride Films : Material and Applications in Integrated Circuit Technology
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Item 1 of 1
SKU 9783540539544Publishing Ref 9783540539544
Springer
LPCVD Silicon Nitride and Oxynitride Films : Material and Applications in Integrated Circuit Technology
Printed Book
SR 518
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SKU 9783540539544Publishing Ref 9783540539544
Author:Habraken, F.H.P.M.
Date of Publication: 1991
Book classification:Engineering,English Books,
No. of pages:172 Pages
Format:Paperback
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About this Product
This volume, based on work done in an ESPRIT project, gives a broad overview of the chemical and physical characteristics of silicon oxynitrides, emphasizing how they influence the electrical behavior of this material, which is important for integrated circuit technology.