Jarir Logo

LPCVD Silicon Nitride and Oxynitride Films : Material and Applications in Integrated Circuit Technology

Printed Book
SR 518
Inclusive of VAT
Sold as: EACH
SR31Per Month/24 months
Author:Habraken, F.H.P.M.
Date of Publication: 1991
Book classification:Engineering,English Books,
No. of pages:172 Pages
Format:Paperback

This book is printed on demand and is non-refundable after purchase

Available Formats :

Printed Book

It will be sent to your address

SR518
Incl. VAT

Choose your delivery preference

Or

About this Product

This volume, based on work done in an ESPRIT project, gives a broad overview of the chemical and physical characteristics of silicon oxynitrides, emphasizing how they influence the electrical behavior of this material, which is important for integrated circuit technology.
Show more

Specifications

SKU9783540539544
Manufacturer Number9783540539544
year published1991
Show more

Report an issue with this product.

Customer Reviews